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IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
Product Details
- Edition:
- 1.0
- Published:
- 01/24/2019
- Number of Pages:
- 37
- File Size:
- 1 file , 1.5 MB